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A.
Singh, K. Baur, S. Brennan, T. Homma, N. Kubo and P. Pianetta, Detection
and characterization of trace element contamination on silicon wafers,
Innershell conference 2002 (submitted). |
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A.
Singh, K. Baur, S. Brennan, T. Homma, N. Kubo and P. Pianetta, X-Ray
Absorption Spectroscopy on Copper Trace Impurities on Silicon Wafers,
MRS Proceedings, Vol. 716, 2002. |
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A.
Singh, P. Goldenzweig, K. Baur, S. Brennan, and P. Pianetta, Feasibility
of In Situ TXRF, Advances in X-Ray Analysis, Vol. 45, 2001. |
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K.
Baur, S. Brennan, B. Burrow, D. Werho, and P. Pianetta, Laboratory
and Synchrotron Radiation total reflection X-ray fluorescence: New
Perspectives in Detection Limits and Data Analysis, Proceedings
of the TXRF 2000 conference in Vienna (Spectrochim. Acta), 2001. |
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K.
Baur, S. Brennan, D. Werho, L. Moro, and P. Pianetta, Recent
Advances and Perspectives in Synchrotron Radiation TXRF,
Proceedings of the SRI 2000 conference in Berlin, 2001. |
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K. Baur , J. Kerner,
S. Brennan, A. Singh, and P. Pianetta,
Aluminum Impurities in Silicon: Investigation of X-ray Raman Scattering
in Total Reflection X-ray Fluorescence Spectroscopy, Journal of
Applied Physics, 2000. |
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J. Wang, P. Pianetta,
K. Baur, and S. Brennan, Analytical
Techniques for Trace Elemental Analyses on Wafer Surfaces for Monitoring
and Controlling Contamination, Semiconductor Pure Water and
Chemicals Conference, March 2000. |
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K. Baur, A. Singh, J.
Wang, J. Kerner, and P. Pianetta, Investigation
of Na impurities on Si wafer surfaces using TXRF, SRI Conference
Proceedings, 161, 2000. |
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P. Pianetta, K. Baur,
A.Singh, S. Brennan, J. Kerner, D. Werho, and J. Wang. Pianetta, Application
of Synchrotron Radiation to TXRF Analysis of Metal Contamnation on
Silicon Wafer Surfaces, Thin Solid Films, 1999. |
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S. Brennan, P. Pianetta,
S. Ghosh, N. Takaura, C Wiemer, A Fischer-Colbrie, S Laderman, A.
Shimazaki, A. Waldhauer, M.A. Zaitz, Update
on Synchrotron Radiation TXRF: New Results, MRS, 1998. |
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