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Please note:  wafer level TXRF measurements are no longer available, details on TXRF Home Page.



A. Singh, K. Baur, S. Brennan, T. Homma, N. Kubo and P. Pianetta, Detection and characterization of trace element contamination on silicon wafers, Innershell conference 2002 (submitted).
A. Singh, K. Baur, S. Brennan, T. Homma, N. Kubo and P. Pianetta, X-Ray Absorption Spectroscopy on Copper Trace Impurities on Silicon Wafers, MRS Proceedings, Vol. 716, 2002.
A. Singh, P. Goldenzweig, K. Baur, S. Brennan, and P. Pianetta, Feasibility of In Situ TXRF, Advances in X-Ray Analysis, Vol. 45, 2001.
K. Baur, S. Brennan, B. Burrow, D. Werho, and P. Pianetta, Laboratory and Synchrotron Radiation total reflection X-ray fluorescence: New Perspectives in Detection Limits and Data Analysis, Proceedings of the TXRF 2000 conference in Vienna (Spectrochim. Acta), 2001.
K. Baur, S. Brennan, D. Werho, L. Moro, and P. Pianetta, Recent Advances and Perspectives in Synchrotron Radiation TXRF, Proceedings of the SRI 2000 conference in Berlin, 2001.
K. Baur , J. Kerner, S. Brennan, A. Singh, and P. Pianetta, Aluminum Impurities in Silicon: Investigation of X-ray Raman Scattering in Total Reflection X-ray Fluorescence Spectroscopy, Journal of Applied Physics, 2000.
J. Wang, P. Pianetta, K. Baur, and S. Brennan, Analytical Techniques for Trace Elemental Analyses on Wafer Surfaces for Monitoring and Controlling Contamination, Semiconductor Pure Water and Chemicals Conference, March 2000.
K. Baur, A. Singh, J. Wang, J. Kerner, and P. Pianetta, Investigation of Na impurities on Si wafer surfaces using TXRF, SRI Conference Proceedings, 161, 2000.
P. Pianetta, K. Baur, A.Singh, S. Brennan, J. Kerner, D. Werho, and J. Wang. Pianetta, Application of Synchrotron Radiation to TXRF Analysis of Metal Contamnation on Silicon Wafer Surfaces, Thin Solid Films, 1999.
S. Brennan, P. Pianetta, S. Ghosh, N. Takaura, C Wiemer, A Fischer-Colbrie, S Laderman, A. Shimazaki, A. Waldhauer, M.A. Zaitz, Update on Synchrotron Radiation TXRF: New Results, MRS, 1998.
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Last modified: January 26, 2007