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Please note:  wafer level TXRF measurements are no longer available, details on TXRF Home Page.



Current research has been to utilize our TXRF setup to do XANES studies to study chemical state of Copper impurities on silicon wafers for a variety of processing conditions.  An in-situ cell has been developed to do similar studies beneath a liquid interface in order to prevent environmental interference.


Web Changes

This is where we'll announce the most recent additions to our web site. If you've visited us before and want to know what's changed, take a look here first.

December 3rd, 2001 Publications have been updated.
August 27th, 2000 Home page has been published!  Please visit us frequently, as numerous updates and changes will be occurring within the next few weeks.


Send mail to pianetta@stanford.edu with questions or comments about this web site.
Last modified: January 26, 2007