Please note: wafer level TXRF measurements are no longer available, details on TXRF Home Page.
Current research has been to utilize our TXRF setup to do XANES studies to study chemical state of Copper impurities on silicon wafers for a variety of processing conditions. An in-situ cell has been developed to do similar studies beneath a liquid interface in order to prevent environmental interference.
This is where we'll announce the most recent additions to our web site. If you've visited us before and want to know what's changed, take a look here first.
Send mail to
questions or comments about this web site.